검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
In situ low-angle cross sectioning: Bevel slope flattening due to self-alignment effects Scheithauer U Applied Surface Science, 255(22), 9062, 2009 |
| 2 |
Ion image enhancement using in-situ implantation of Cs+ and O-2(+) ions Seki S, Tamura H, Saitoh W Applied Surface Science, 203, 832, 2003 |
| 3 |
A novel technique for shallow angle beveling of SiC to prevent surface breakdown in power devices Merrett JN, Sheridan DC, Williams Jr, Tin CC, Cressler JD Materials Science Forum, 353-356, 623, 2001 |