검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Evaluations of intrinsic time dependent dielectric breakdown of dielectric copper diffusion barriers Zhao L, Lofrano M, Croes K, Van Besien E, Tokei Z, Wilson CJ, Degraeve R, Kauerauf T, Beyer GP, Claeys C Thin Solid Films, 520(1), 662, 2011 |
| 2 |
Analysis and characterization of a mechanical sensor to monitor stress in interconnect features Wilson CJ, Croes K, Tokei Z, Beyer GP, Gallacher BJ, Bull SJ, Horsfall AB, O'Neill AG Thin Solid Films, 519(1), 443, 2010 |
| 3 |
The removal of copper oxides by ethyl alcohol monitored in situ by spectroscopic ellipsometry Satta A, Shamiryan D, Baklanov MR, Whelan CM, Le QT, Beyer GP, Vantomme A, Maex K Journal of the Electrochemical Society, 150(5), G300, 2003 |
| 4 |
Characterization of Cu surface cleaning by hydrogen plasma Baklanov MR, Shamiryan DG, Tokei Z, Beyer GP, Conard T, Vanhaelemeersch S, Maex K Journal of Vacuum Science & Technology B, 19(4), 1201, 2001 |