검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Angular-Distribution of Sputtered Neutrals in a Post Magnetron Geometry - Measurement and Monte-Carlo Simulation Eisenmengersittner C, Beyerknecht R, Bergauer A, Bauer W, Betz G Journal of Vacuum Science & Technology A, 13(5), 2435, 1995 |