검색결과 : 1건
No. | Article |
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1 |
Spectroellipsometric analysis of CHF3 plasma-polymerized fluorocarbon films Easwarakhanthan T, Beyssen D, Le Brizoual L, Bougdira J Journal of Vacuum Science & Technology A, 24(4), 1036, 2006 |
No. | Article |
---|---|
1 |
Spectroellipsometric analysis of CHF3 plasma-polymerized fluorocarbon films Easwarakhanthan T, Beyssen D, Le Brizoual L, Bougdira J Journal of Vacuum Science & Technology A, 24(4), 1036, 2006 |