검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Study of the Electrical Active Defects Induced by Reactive Ion Etching in N-Type Silicon Biavati M, Perezquintana I, Poggi A, Susi E Journal of Vacuum Science & Technology B, 13(5), 2139, 1995 |
| No. | Article |
|---|---|
| 1 |
Study of the Electrical Active Defects Induced by Reactive Ion Etching in N-Type Silicon Biavati M, Perezquintana I, Poggi A, Susi E Journal of Vacuum Science & Technology B, 13(5), 2139, 1995 |