검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Laboratory Setup for Projection Electron Lithography and a Monte-Carlo Simulation of Scattering Mask Transmission Miller PD, Gibson JM, Bieeker AJ, Liddle JA Journal of Vacuum Science & Technology B, 11(6), 2352, 1993 |
| No. | Article |
|---|---|
| 1 |
Laboratory Setup for Projection Electron Lithography and a Monte-Carlo Simulation of Scattering Mask Transmission Miller PD, Gibson JM, Bieeker AJ, Liddle JA Journal of Vacuum Science & Technology B, 11(6), 2352, 1993 |