검색결과 : 2건
No. | Article |
---|---|
1 |
Comparison of high resolution negative electron beam resists Bilenberg B, Scholer M, Shi P, Schmidt MS, Boggild P, Fink M, Schuster C, Reuther F, Gruetzner C, Kristensen A Journal of Vacuum Science & Technology B, 24(4), 1776, 2006 |
2 |
Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography Bilenberg B, Hansen M, Johansen D, Ozkapici V, Jeppesen C, Szabo P, Obieta IM, Arroyo O, Tegenfeldt JO, Kristensen A Journal of Vacuum Science & Technology B, 23(6), 2944, 2005 |