검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of bipolar pulsed dc bias on the mechanical properties of silicon oxide thin film by plasma enhanced chemical vapor deposition Jin SB, Kim SI, Choi YS, Choi IS, Han JG Current Applied Physics, 11(4), 1107, 2011 |
| No. | Article |
|---|---|
| 1 |
Effect of bipolar pulsed dc bias on the mechanical properties of silicon oxide thin film by plasma enhanced chemical vapor deposition Jin SB, Kim SI, Choi YS, Choi IS, Han JG Current Applied Physics, 11(4), 1107, 2011 |