화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Infrared spectroscopic ellipsometry for residual water detection in annealed sol-gel thin layers
Bruynooghe S, Bertin F, Chabli A, Gay JC, Blanchard B, Couchaud M
Thin Solid Films, 313-314, 722, 1998
2 Optimization of Ultrathin Gate Oxide in a Silo/Rtn Isolation Process for Advanced ULSI - Introducing a New Concept of Surface Gettering
Deleonibus S, Martin F, Blanchard B, Ermolieff A, Papon AM
Journal of the Electrochemical Society, 141(10), 2811, 1994