검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Auger Depth Profiles of Tin/Ti Films in Submicron Contact Holes - A Comparison of Collimated and Uncollimated Deposition Processes Hoener CF, Pylant E, Boden EG, Wang SQ Journal of Vacuum Science & Technology B, 12(3), 1394, 1994 |