검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Experimental investigation of plasma recovery during the pulse-off time in plasma source ion implantation Chung KJ, Jung B, Choe JM, Kim GH, Hwang YS Thin Solid Films, 547, 13, 2013 |
| 2 |
Numerical investigation of plasma recovery in plasma source ion implantation Chung KJ, Choe JM, Kim GH, Hwang YS Thin Solid Films, 521, 197, 2012 |