검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of TaSix, thin films on SiO2 using TaF5 and Si2H6 Lemonds AM, Bolom T, Ahearn WJ, Gay DC, White JM, Ekerdt JG Thin Solid Films, 488(1-2), 9, 2005 |
| 2 |
Ultra thin tungsten nitride film growth on dielectric surfaces Sun YM, Engbrecht ER, Bolom T, Cilino C, Sim JH, White JM, Ekerdt JG, Pfeifer K Thin Solid Films, 458(1-2), 251, 2004 |