검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Oxynitridation of Silicon and Postnitridation of Thermal Silicon-Oxide in N2O in a Vertical Furnace Lange P, Boness H, Hendriks M Journal of the Electrochemical Society, 144(10), 3650, 1997 |
| No. | Article |
|---|---|
| 1 |
Oxynitridation of Silicon and Postnitridation of Thermal Silicon-Oxide in N2O in a Vertical Furnace Lange P, Boness H, Hendriks M Journal of the Electrochemical Society, 144(10), 3650, 1997 |