검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Study of SiOxNy as a bottom antireflective coating and its pattern transferring capability Peng X, Wang Z, Dimitrov D, Boonstra T, Xue S Journal of Vacuum Science & Technology A, 25(4), 1078, 2007 |
| 2 |
Etching 0.35 Mu-M Polysilicon Gates on a High-Density Helicon Etcher Kraft R, Boonstra T, Prengle S Journal of Vacuum Science & Technology B, 14(1), 543, 1996 |