검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Equilibrium Chemistry in BCl3-H2-Ar Plasma Gornushkin IB, Shabanov SV, Sennikov PG Plasma Chemistry and Plasma Processing, 39(4), 1087, 2019 |
| 2 |
Low pressure chemical vapour deposition of BN: Relationship between gas phase chemistry and coating microstructure Carminati P, Buffeteau T, Daugey N, Chollon G, Rebillat F, Jacques S Thin Solid Films, 664, 106, 2018 |
| 3 |
Dry etching characteristics of TiN thin films in CF4/BCl3/N-2 plasma Joo YH, Woo JC, Kim CI Thin Solid Films, 520(6), 2339, 2012 |
| 4 |
High rate deposition and in situ doping of silicon films for solar cells on glass Gromball F, Heemier J, Linke N, Burchert M, Muller J Solar Energy Materials and Solar Cells, 84(1-4), 71, 2004 |
| 5 |
Living cationic polymerization of olefins. How did the discovery come about? Kennedy JP Journal of Polymer Science Part A: Polymer Chemistry, 37(14), 2285, 1999 |
| 6 |
Ab-Initio Study of Chemical-Species in the BCl3 Plasma - Structure, Spectra, and Decomposition Paths Baeck KK, Bartlett RJ Journal of Chemical Physics, 106(11), 4604, 1997 |
| 7 |
Metastable Chlorine Ion Kinetics in Inductively-Coupled Plasmas Hebner GA, Fleddermann CB, Miller PA Journal of Vacuum Science & Technology A, 15(5), 2698, 1997 |
| 8 |
Matrix-Isolation Study of the Interaction of Excited Neon Atoms with BCl3 - Infrared-Spectra of Bcl3+, Bcl2+, and Bcl(3)(+) Jacox ME, Irikura KK, Thompson WE Journal of Chemical Physics, 104(22), 8871, 1996 |