검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Capillary jet injection of SiH4 in the high density plasma chemical vapor deposition of SiO2 Botha R, Novikova T, Bulkin P Journal of Vacuum Science & Technology A, 27(4), 849, 2009 |
| 2 |
Silane injection in a high-density low-pressure plasma system and its influence on the deposition kinetics and material properties of SiO2 Botha R, Ibrahim BH, Bulkin P, Drevillon B Journal of Vacuum Science & Technology A, 26(5), 1115, 2008 |
| 3 |
Deposition of dielectrics using a matrix distributed electron cyclotron resonance plasma enhanced chemical vapor deposition system Botha R, Ibrahim BH, Bulkin P, Drevillon B Thin Solid Films, 515(19), 7594, 2007 |