검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Laboratory LPP EUV reflectorneter working with non-polarized radiation van Loyen L, Bottger T, Schadlich S, Braun S, Foltyn T, Leson A, Scholze F, Mullender S Applied Surface Science, 252(1), 57, 2005 |
| 2 |
Stress compensation of a Mo/Si/C highly reflective multilayer by means of an optimised buffer layer and heat treatment Moss M, Bottger T, Braun S, Foltyn T, Leson A Thin Solid Films, 468(1-2), 322, 2004 |
| 3 |
Thermal stability of Mo/Si multilayers with boron carbide interlayers Bottger T, Meyer DC, Paufler P, Braun S, Moss M, Mai H, Beyer E Thin Solid Films, 444(1-2), 165, 2003 |