검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Electrochemical impedance spectroscopy investigation of bath aging in damascene process chemistries Gabrielli C, Mocoteguy P, Perrot H, Zdunek A, Bouard P, Haddix M Electrochemical and Solid State Letters, 7(3), C31, 2004 |
| 2 |
Electroacoustic measurements on electrodeposited films obtained from copper damascene process chemistries Gabrielli C, Mocoteguy P, Perrot H, Zdunek A, Bouard P, Haddix M Electrochemical and Solid State Letters, 7(4), C52, 2004 |