화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Second-oxidation properties of thin polysilicon films grown by LPCVD and heavily in situ boron-doped
Boukezzata M, Birouk B, Bielle-Daspet D
Thin Solid Films, 335(1-2), 70, 1998
2 Characteristics of the Thermal-Oxidation of Heavily Boron-Doped Polycrystalline Silicon Thin-Films
Boukezzata M, Bielledaspet D, Sarrabayrouse G, Mansour F
Thin Solid Films, 279(1-2), 145, 1996
3 Conductivity of Boron-Implanted Polycrystalline Thin Silicon Films
Mansour F, Bouchemat M, Boukezzata M, Touidjen NH, Bielledaspet D, Mirouh K
Thin Solid Films, 261(1-2), 12, 1995