검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Sub-20 nm x-ray nanolithography using conventional mask technologies on monochromatized synchrotron radiation Simon G, Haghiri-Gosnet AM, Bourneix J, Decanini D, Chen Y, Rousseaux F, Launois H, Vidal B Journal of Vacuum Science & Technology B, 15(6), 2489, 1997 |
| 2 |
Evaluation of a Diamond-Based X-Ray Mask for High-Resolution X-Ray Proximity Lithography Ravet MF, Rousseaux F, Chen Y, Haghirigosnet AM, Carcenac F, Decanini D, Bourneix J, Launois H, Bachmann PK, Lade H, Wiechert DU, Wilson H Journal of Vacuum Science & Technology B, 13(6), 3055, 1995 |