화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 High strain embedded-SiGe via low temperature reduced pressure chemical vapor deposition
He H, Brabant P, Chung K, Shinriki M, Adam T, Reznicek A, Sadana D, Hasaka S, Francis T
Thin Solid Films, 520(8), 3175, 2012
2 Gas phase particle formation and elimination on Si (100) in low temperature reduced pressure chemical vapor deposition silicon-based epitaxial layers
Shinriki M, Chung K, Hasaka S, Brabant P, He H, Adam TN, Sadana D
Thin Solid Films, 520(8), 3190, 2012
3 Hydrogen termination for extended queue times for low temperature epitaxy
Brabant P, Ferrara J, Pagliaro B, Weeks K, Rittgers M, Scott R, Zhang Y, Landin T, Irving T, Spear J, Italiano J, Thomas SG
Applied Surface Science, 255(5), 1741, 2008
4 Achieving a SiGeHBT epitaxial emitter with novel low thermal budget technique
Brabant P, Wen JQ, Italiano J, Landin T, Cody N, Haen L
Applied Surface Science, 224(1-4), 347, 2004