검색결과 : 4건
No. | Article |
---|---|
1 |
High strain embedded-SiGe via low temperature reduced pressure chemical vapor deposition He H, Brabant P, Chung K, Shinriki M, Adam T, Reznicek A, Sadana D, Hasaka S, Francis T Thin Solid Films, 520(8), 3175, 2012 |
2 |
Gas phase particle formation and elimination on Si (100) in low temperature reduced pressure chemical vapor deposition silicon-based epitaxial layers Shinriki M, Chung K, Hasaka S, Brabant P, He H, Adam TN, Sadana D Thin Solid Films, 520(8), 3190, 2012 |
3 |
Hydrogen termination for extended queue times for low temperature epitaxy Brabant P, Ferrara J, Pagliaro B, Weeks K, Rittgers M, Scott R, Zhang Y, Landin T, Irving T, Spear J, Italiano J, Thomas SG Applied Surface Science, 255(5), 1741, 2008 |
4 |
Achieving a SiGeHBT epitaxial emitter with novel low thermal budget technique Brabant P, Wen JQ, Italiano J, Landin T, Cody N, Haen L Applied Surface Science, 224(1-4), 347, 2004 |