검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Chemical-Vapor-Deposition of Copper from Cu-I Hexafluoroacetylacetonate Trimethylvinylsilane for Ultralarge Scale Integration Applications Braeckelmann G, Manger D, Burke A, Peterson GG, Kaloyeros AE, Reidsema C, Omstead TR, Loan JF, Sullivan JJ Journal of Vacuum Science & Technology B, 14(3), 1828, 1996 |
| 2 |
In-Situ Mass-Spectral and Infrared Studies of the Gas-Phase Evolution and Decomposition Pathways of Cu-II(Hfac)(2) - Application in the Development of Plasma-Assisted Chemical-Vapor-Deposition of Copper Zheng B, Braeckelmann G, Kujawski K, Lou I, Lane S, Kaloyeros AE Journal of the Electrochemical Society, 142(11), 3896, 1995 |