검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Influence of coil power on the etching characteristics in a high density plasma etcher Ayon AA, Braff RA, Bayt R, Sawin HH, Schmidt MA Journal of the Electrochemical Society, 146(7), 2730, 1999 |
| 2 |
Application of the footing effect in the micromachining of self-aligned, free-standing, complimentary metal-oxide-semiconductor compatible structures Ayon AA, Ishihara K, Braff RA, Sawin HH, Schmidt MA Journal of Vacuum Science & Technology A, 17(4), 2274, 1999 |
| 3 |
Microfabrication and testing of suspended structures compatible with silicon-on-insulator technology Ayon AA, Ishihara K, Braff RA, Sawin HH, Schmidt MA Journal of Vacuum Science & Technology B, 17(4), 1589, 1999 |