검색결과 : 1건
No. | Article |
---|---|
1 |
In-Situ Vapor-Phase Pregate Oxide Cleaning and Its Effects on Metal-Oxide-Semiconductor Device Characteristics Ma Y, Green ML, Torek K, Ruzyllo J, Opila R, Konstadinidis K, Siconolfi D, Brasen D Journal of the Electrochemical Society, 142(11), L217, 1995 |