검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Effect of thermal annealing on the structural and mechanical properties of amorphous silicon carbide films prepared by polymer-source chemical vapor deposition Awad Y, El Khakani MA, Brassard D, Smirani R, Camire N, Lessard M, Aktik C, Scarlete M, Mouine J Thin Solid Films, 518(10), 2738, 2010 |
| 2 |
Dielectric properties of sol-gel derived high-k titanium silicate thin films Sarkar DK, Brassard D, El Khakani MA, Ouellet L Thin Solid Films, 515(11), 4788, 2007 |
| 3 |
Compositional effect on the dielectric properties of high-k titanium silicate thin films deposited by means of a cosputtering process Brassard D, Sarkar DK, El Khakani MA, Ouellet L Journal of Vacuum Science & Technology A, 24(3), 600, 2006 |
| 4 |
High-k titanium silicate thin films grown by reactive magnetron sputtering for complementary metal-oxide-semiconductor applications Brassard D, Sarkar DK, El Khakani MA, Ouellet L Journal of Vacuum Science & Technology A, 22(3), 851, 2004 |