검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Evolution of fluorine and boron profiles during annealing in crystalline Si Lopeza P, Pelaz L, Duffy R, Meunier-Beillard P, Roozeboom F, van der Tak K, Breimer P, van Berkum JGM, Verheijen MA, Kaiser M Journal of Vacuum Science & Technology B, 26(1), 377, 2008 |
| 2 |
Doping fin field-effect transistor sidewalls: Impurity dose retention in silicon due to high angle incident ion implants and the impact on device performance Duffy R, Curatola G, Pawlak BJ, Doornbos G, van der Tak K, Breimer P, van Berkum JGM, Roozeboom F Journal of Vacuum Science & Technology B, 26(1), 402, 2008 |