검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Process optimization and integration of trimethylsilane-deposited alpha-SiC : H and alpha-SiCO : H dielectric thin films for damascene processing Gray WD, Loboda MJ, Bremmer JN, Struyf H, Lepage M, Van Hove M, Donaton RA, Sleeckx E, Stucchi M, Lanckmans F, Gao T, Boullart W, Coenegrachts B, Maenhoudt M, Vanhaelemeersch S, Meynen H, Maex K Journal of the Electrochemical Society, 150(7), G404, 2003 |
| 2 |
Perfluorocyclobutane Aromatic Ether Polymers .2. Thermal Oxidative Stability and Decomposition of a Thermoset Polymer Kennedy AP, Babb DA, Bremmer JN, Pasztor AJ Journal of Polymer Science Part A: Polymer Chemistry, 33(11), 1859, 1995 |