검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Integrated model for chemically enhanced physical vapor deposition of tantalum nitride-based films Li N, Brenner PW, Ruzic DN Journal of Vacuum Science & Technology B, 24(3), 1162, 2006 |
| No. | Article |
|---|---|
| 1 |
Integrated model for chemically enhanced physical vapor deposition of tantalum nitride-based films Li N, Brenner PW, Ruzic DN Journal of Vacuum Science & Technology B, 24(3), 1162, 2006 |