화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Epitaxial layer sheet resistance outside and under ohmic contacts measurements using electrostatic force microscopy
Bresse JF, Blayac S
Solid-State Electronics, 45(7), 1071, 2001
2 Low damage dry etching of III-V materials for heterojunction bipolar transistor applications using a chlorinated inductively coupled plasma
Etrillard J, Bresse JF, Daguet C, Riet M, Mba J
Journal of Vacuum Science & Technology A, 17(4), 1174, 1999
3 Anisotropic Etching of InP with Low Sidewall and Surface-Induced Damage in Inductively-Coupled Plasma-Etching Using Sicl4
Etrillard J, Ossart P, Patriarche G, Juhel M, Bresse JF, Daguet C
Journal of Vacuum Science & Technology A, 15(3), 626, 1997
4 Base Metallization Stability in InP/InGaAs Heterojunction Bipolar-Transistors and Its Influence on Leakage Currents
Caffin D, Besombes C, Bresse JF, Legay P, Leroux G, Patriarche G, Launay P
Journal of Vacuum Science & Technology B, 15(4), 854, 1997
5 Fabrication of All-Optical Quantum-Well Bistable Microresonators by Reactive Ion Etching
Rivera T, Izrael A, Azoulay R, Kuszelewicz R, Bresse JF, Oudar JL, Ladan FR
Journal of Vacuum Science & Technology B, 13(2), 268, 1995