검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma etching for arrayed waveguide gratings fabrication in silica on silicon technology Bretoiu S, Di Mola D, Fioravanti E, Visona S Journal of Vacuum Science & Technology B, 20(5), 2085, 2002 |
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma etching for arrayed waveguide gratings fabrication in silica on silicon technology Bretoiu S, Di Mola D, Fioravanti E, Visona S Journal of Vacuum Science & Technology B, 20(5), 2085, 2002 |