화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Hydrogen barrier layer against silicon oxidation during atomic layer deposition of Al2O3 and HfO2
Frank MM, Wang Y, Ho MT, Brewer RT, Moumen N, Chabal YJ
Journal of the Electrochemical Society, 154(2), G44, 2007
2 Rheed in-plane rocking curve analysis of biaxially-textured polycrystalline MgO films on amorphous substrates grown by ion beam-assisted deposition
Brewer RT, Hartman JW, Groves JR, Arendt PN, Yashar PC, Atwater HA
Applied Surface Science, 175, 691, 2001