검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Highly porous silicon membrane fabrication using polymer self-assembly Black CT, Guarini KW, Breyta G, Colburn MC, Ruiz R, Sandstrom RL, Sikorski EM, Zhang Y Journal of Vacuum Science & Technology B, 24(6), 3188, 2006 |
| 2 |
Development of 157 nm positive resists Ito H, Wallraff GM, Fender N, Brock PJ, Hinsberg WD, Mahorowala A, Larson CE, Truong HD, Breyta G, Allen RD Journal of Vacuum Science & Technology B, 19(6), 2678, 2001 |
| 3 |
Monomer reactivities and kinetics in radical copolymerization of hydroxystyrene derivatives and tert-butyl (meth)acrylate Ito H, Dalby C, Pomerantz A, Sherwood M, Sato R, Sooriyakumaran R, Guy K, Breyta G Macromolecules, 33(14), 5080, 2000 |
| 4 |
Effect of Photo Acid Generator Concentration on the Process Latitude of a Chemically Amplified Resist Petrillo KE, Pomerene AT, Babich ED, Seeger DE, Hofer D, Breyta G, Ito H Journal of Vacuum Science & Technology B, 12(6), 3863, 1994 |
| 5 |
Single-Layer Chemically Amplified Photoresists for 193-nm Lithography Wallraff GM, Allen RD, Hinsberg WD, Larson CF, Johnson RD, Dipietro R, Breyta G, Hacker N, Kunz RR Journal of Vacuum Science & Technology B, 11(6), 2783, 1993 |