검색결과 : 1건
No. | Article |
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1 |
Experimental and modeling study of the sputtered particle transport in an r.f. magnetron discharge Clenet F, Briaud P, Lemperiere G, Turban G Thin Solid Films, 346(1-2), 290, 1999 |
No. | Article |
---|---|
1 |
Experimental and modeling study of the sputtered particle transport in an r.f. magnetron discharge Clenet F, Briaud P, Lemperiere G, Turban G Thin Solid Films, 346(1-2), 290, 1999 |