검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Concepts for in situ characterization and control of plasma ion assisted deposition processes Harhausen J, Foest R, Stenzel O, Wilbrandt S, Franke C, Brinkmann RP Thin Solid Films, 673, 94, 2019 |
| 2 |
Energetic neutral fluxes towards surfaces-in a magnetically enhanced reactive ion etch-like reactor Sabisch W, Kratzer M, Brinkmann RP Journal of Vacuum Science & Technology A, 21(4), 1205, 2003 |
| 3 |
A Reduced-Fluid Dynamic Discharge Model for Applications in Technology-Oriented Computer-Aided-Design Brinkmann RP, Furst R, Werner C, Hierlemann M Journal of the Electrochemical Society, 143(6), 1940, 1996 |
| 4 |
The Effect of the Presheath on the Ion Angular-Distribution at the Wafer Surface Zheng J, Brinkmann RP, Mcvittie JP Journal of Vacuum Science & Technology A, 13(3), 859, 1995 |