검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Characteristics of a large diameter reactive ion beam generated by an electron cyclotron resonance microwave plasma source Geisler S, Brockhaus A, Engemann J Journal of Vacuum Science & Technology A, 19(2), 539, 2001 |
| 2 |
Plasma erosion of a magnesium radio-frequency cathode measured by laser-induced fluorescence Brockhaus A, Georg A, Wingsch V, Engemann J Journal of Vacuum Science & Technology A, 18(3), 927, 2000 |
| 3 |
Determination of Chemically Active Species in a Novel Microwave Plasma Source by Laser-Induced Fluorescence Brockhaus A, Yuan Y, Behle S, Engemann J Journal of Vacuum Science & Technology A, 14(3), 1882, 1996 |
| 4 |
Determination of the Ion Velocity in a Radio-Frequency Ion-Beam by Laser-Induced Fluorescence Brockhaus A, Yuan Y, Engemann J Journal of Vacuum Science & Technology A, 13(2), 400, 1995 |
| 5 |
Characterization of a Slot Antenna Microwave Plasma Source for Hydrogen Plasma Cleaning Korzec D, Werner F, Brockhaus A, Engemann J, Schneider TP, Nemanich RJ Journal of Vacuum Science & Technology A, 13(4), 2074, 1995 |