검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of Plasma and Thermal Annealing on Chemical-Vapor-Deposition Dielectrics Grown Using SiH4-H2O2 Gas-Mixtures Gaillard F, Brault P, Brouquet P Journal of Vacuum Science & Technology A, 15(5), 2478, 1997 |
| 2 |
Silicon Dioxide Chemical-Vapor-Deposition Using Silane and Hydrogen-Peroxide Gaillard F, Brault P, Brouquet P Journal of Vacuum Science & Technology B, 14(4), 2767, 1996 |