검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Approaches in Wet Chemical Etching for Defect Delineation in Silicon-on-Insulator Substrates Mahliss J, Hakim R, Abbadie A, Brunier F, Kolbesen BO Journal of the Electrochemical Society, 158(2), D107, 2011 |
| 2 |
Defect delineation and characterization in SiGe, Ge and other semiconductor-on-insulator structures Abbadie A, Allibert F, Brunier F Solid-State Electronics, 53(8), 850, 2009 |
| 3 |
Study of HCl and secco defect etching for characterization of thick sSOI Abbadie A, Bedell SW, Hartmann JM, Sadana DK, Brunier F, Figuet C, Cayrefourcq I Journal of the Electrochemical Society, 154(8), H713, 2007 |