검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Magnetically Confined Inductively-Coupled Plasma-Etching Reactor Lai C, Brunmeier B, Woods RC Journal of Vacuum Science & Technology A, 13(4), 2086, 1995 |
| No. | Article |
|---|---|
| 1 |
Magnetically Confined Inductively-Coupled Plasma-Etching Reactor Lai C, Brunmeier B, Woods RC Journal of Vacuum Science & Technology A, 13(4), 2086, 1995 |