화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Who puts the most energy into energy conservation? A segmentation of energy consumers based on energy-related behavioral characteristics
Sutterlin B, Brunner TA, Siegrist M
Energy Policy, 39(12), 8137, 2011
2 Immersion lithography: New opportunities for semiconductor manufacturing
Gil D, Brunner TA, Fonseca C, Seong N, Streefkerk B, Wagner C, Stavenga M
Journal of Vacuum Science & Technology B, 22(6), 3431, 2004
3 Why optical lithography will live forever
Brunner TA
Journal of Vacuum Science & Technology B, 21(6), 2632, 2003
4 Relationship between the slope of the HD curve and the fundamental resist process contrast
Brunner TA
Journal of Vacuum Science & Technology B, 17(6), 3362, 1999
5 Data analysis methods for evaluating lithographic performance
Ferguson RA, Martino RM, Brunner TA
Journal of Vacuum Science & Technology B, 15(6), 2387, 1997