검색결과 : 5건
No. | Article |
---|---|
1 |
Who puts the most energy into energy conservation? A segmentation of energy consumers based on energy-related behavioral characteristics Sutterlin B, Brunner TA, Siegrist M Energy Policy, 39(12), 8137, 2011 |
2 |
Immersion lithography: New opportunities for semiconductor manufacturing Gil D, Brunner TA, Fonseca C, Seong N, Streefkerk B, Wagner C, Stavenga M Journal of Vacuum Science & Technology B, 22(6), 3431, 2004 |
3 |
Why optical lithography will live forever Brunner TA Journal of Vacuum Science & Technology B, 21(6), 2632, 2003 |
4 |
Relationship between the slope of the HD curve and the fundamental resist process contrast Brunner TA Journal of Vacuum Science & Technology B, 17(6), 3362, 1999 |
5 |
Data analysis methods for evaluating lithographic performance Ferguson RA, Martino RM, Brunner TA Journal of Vacuum Science & Technology B, 15(6), 2387, 1997 |