검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Chemically amplified resist processing with top coats for deep-ultraviolet and e-beam applications Petrillo K, Bucchignano J, Angelopoulos M, Cornett K, Brunsvold W Journal of Vacuum Science & Technology B, 16(6), 3709, 1998 |