검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Stripping of photoresist using a remote thermal Ar/O-2 and Ar/N-2/O-2 plasma Brussaard GJH, Letourneur KGY, Schaepkens M, van de Sanden MCM, Schram DC Journal of Vacuum Science & Technology B, 21(1), 61, 2003 |
| No. | Article |
|---|---|
| 1 |
Stripping of photoresist using a remote thermal Ar/O-2 and Ar/N-2/O-2 plasma Brussaard GJH, Letourneur KGY, Schaepkens M, van de Sanden MCM, Schram DC Journal of Vacuum Science & Technology B, 21(1), 61, 2003 |