검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Hydrogen and Deuterium Migration in Annealed Plasma-Deposited Silicon-Nitride Films Savall C, Bruyere JC Thin Solid Films, 258(1-2), 1, 1995 |
| 2 |
Chemical-Bonds and Microstructure in Nearly Stoichiometric PECVD Asi(X)N(Y)H(Z) Savall C, Bruyere JC, Stoquert JP Thin Solid Films, 260(2), 174, 1995 |