화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Spatially Confined Chemistry - Fabrication of Ge Quantum-Dot Arrays
Heath JR, Williams RS, Shiang JJ, Wind SJ, Chu J, Demic C, Chen W, Stanis CL, Bucchignano JJ
Journal of Physical Chemistry, 100(8), 3144, 1996
2 Lithography and Fabrication Processes for Sub-100 nm Scale Complementary Metal-Oxide-Semiconductor
Wind SJ, Taur Y, Lee YH, Mii Y, Viswanathan RG, Bucchignano JJ, Pomerene AT, Sicina RM, Milkove KR, Stiebritz JW, Roy RA, Hu CK, Manny MP, Cohen S, Chen W
Journal of Vacuum Science & Technology B, 13(6), 2688, 1995