검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Deep dry-etch of silica in a helicon plasma etcher for optical waveguide fabricatlon Li WT, Bulla DAP, Love J, Luther-Davies B, Charles C, Boswell R Journal of Vacuum Science & Technology A, 23(1), 146, 2005 |
| 2 |
Ge-doped SiO2 thin films produced by helicon activated reactive evaporation Li WT, Bulla DAP, Charles C, Boswell R, Love J, Luther-Davies B Thin Solid Films, 419(1-2), 82, 2002 |
| 3 |
Deposition of thick TEOS PECVD silicon oxide layers for integrated optical waveguide applications Bulla DAP, Morimoto NI Thin Solid Films, 334(1-2), 60, 1998 |