검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low temperature ZEP-520A development process for enhanced critical dimension realization in reactive ion etch etched polysilicon Wang H, Laws GM, Milicic S, Boland P, Handugan A, Pratt M, Eschrich T, Myhajlenko S, Allgair JA, Bunday B Journal of Vacuum Science & Technology B, 25(1), 102, 2007 |
| 2 |
X-ray reflectometry and x-ray fluorescence monitoring of the atomic layer deposition process for high-k gate dielectrics Hung PY, Gondran C, Ghatak-Roy A, Terada S, Bunday B, Yeung H, Diebold A Journal of Vacuum Science & Technology B, 23(5), 2244, 2005 |