검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Nanoimprint lithography in the cyclic olefin copolymer, Topas((R)), a highly ultraviolet-transparent and chemically resistant thermoplast Nielsen T, Nilsson D, Bundgaard F, Shi P, Szabo P, Geschke O, Kristensen A Journal of Vacuum Science & Technology B, 22(4), 1770, 2004 |