검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of oxide on trench edge defect formation in ion-implanted silicon Burbure N, Rudawski NG, Jones KS Electrochemical and Solid State Letters, 10(6), H184, 2007 |
| No. | Article |
|---|---|
| 1 |
Effect of oxide on trench edge defect formation in ion-implanted silicon Burbure N, Rudawski NG, Jones KS Electrochemical and Solid State Letters, 10(6), H184, 2007 |