검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Control of the receding meniscus in immersion lithography Burnett H, Shedd T, Nellis G, El-Morsi M, Engelstad R, Garoff S, Varanasi K Journal of Vacuum Science & Technology B, 23(6), 2611, 2005 |
| 2 |
Static and dynamic contact angles of water on photoresist Burnett H, Shedd T, Nellis G, Van Peski C Journal of Vacuum Science & Technology B, 23(6), 2721, 2005 |