검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Preparation and characterization of ceramic thin film thermocouples Gregory OJ, Busch E, Fralick GC, Chen XM Thin Solid Films, 518(21), 6093, 2010 |
| 2 |
Interactions of photoresist stripping plasmas with nanoporous organo-silicate ultra low dielectric constant dielectrics Lazzeri P, Oehrlein GS, Stueber GJ, McGowan R, Busch E, Pederzoli S, Jeynes C, Bersani M, Anderle M Thin Solid Films, 516(11), 3697, 2008 |
| 3 |
Study of plasma-induced damage of porous ultralow-k dielectric films during photoresist stripping Xu SL, Qin C, Diao L, Gilbert D, Hou L, Wiesnoski A, Busch E, McGowan R, White B, Weber F Journal of Vacuum Science & Technology B, 25(1), 156, 2007 |
| 4 |
On the photoresist stripping and damage of ultralow k dielectric materials using remote H-2- and D-2-based discharges Stueber GJ, Oehrlein GS, Lazzeri P, Bersani M, Anderle M, Busch E, McGowan R Journal of Vacuum Science & Technology B, 25(5), 1593, 2007 |
| 5 |
Cleaning of patterned porous low-k dielectrics with water, carbon dioxide and ambidextrous surfactants Keagy JA, Zhang XG, Johnston KP, Busch E, Weber F, Wolf PJ, Rhoad T Journal of Supercritical Fluids, 39(2), 277, 2006 |
| 6 |
Time of flight secondary ion mass spectroscopy investigation of ultralow-k dielectric modifications in hydrogen and deuterium plasmas Lazzeri P, Stueber GJ, Oehrlein GS, McGowan R, Busch E Journal of Vacuum Science & Technology B, 24(6), 2695, 2006 |