검색결과 : 7건
No. | Article |
---|---|
1 |
Comparison of pulsed and downstream deposition of fluorocarbon materials from C3F8 and c-C4F8 plasmas Martin IT, Malkov GS, Butoi CI, Fisher ER Journal of Vacuum Science & Technology A, 22(2), 227, 2004 |
2 |
Mechanisms for deposition and etching in fluorosilane plasma processing of silicon Williams KL, Butoi CI, Fisher ER Journal of Vacuum Science & Technology A, 21(5), 1688, 2003 |
3 |
Mechanisms and energy transfer for surface generation of NH2 during NH3 plasma processing of metal and polymer substrates Butoi CI, Steen ML, Peers JRD, Fisher ER Journal of Physical Chemistry B, 105(25), 5957, 2001 |
4 |
Identification of gas-phase reactive species and chemical mechanisms occurring at plasma-polymer surface interfaces Steen ML, Butoi CI, Fisher ER Langmuir, 17(26), 8156, 2001 |
5 |
Ion and substrate effects on surface reactions of CF2 using C2F6, C2F6/H-2, and hexafluoropropylene oxide plasmas Butoi CI, Mackie NM, Williams KL, Capps NE, Fisher ER Journal of Vacuum Science & Technology A, 18(6), 2685, 2000 |
6 |
Surface interactions of NH2 radicals in NH3 plasmas McCurdy PR, Butoi CI, Williams KL, Fisher ER Journal of Physical Chemistry B, 103(33), 6919, 1999 |
7 |
Electron-transfer dynamics in DTDCI/MoS2 and DTDCI/WS2 nanoclusters Butoi CI, Langdon BT, Kelley DF Journal of Physical Chemistry B, 102(48), 9635, 1998 |